Structural analysis of DC magnetron sputtered and spin...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 Vol. 266; Iss. 8

Structural analysis of DC magnetron sputtered and spin coated thin films using RBS, TEM and X-ray reflectivity methods

Umananda M. Bhatta, J. Ghatak, Mrinmay Mukhopadhyay, Raymond Conley, Chian Liu, P.V. Satyam
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Volume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.12.063
File:
PDF, 741 KB
english, 2008
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