An ion track based approach to nano- and micro-electronics

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 Vol. 266; Iss. 8

An ion track based approach to nano- and micro-electronics

K. Hoppe, W.R. Fahrner, D. Fink, S. Dhamodoran, A. Petrov, A. Chandra, A. Saad, F. Faupel, V.S.K. Chakravadhanula, V. Zaporotchenko
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Volume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.12.069
File:
PDF, 276 KB
english, 2008
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