Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Ion beam studies on reactive DC sputtered manganese doped indium tin oxide thin films
S.R. Sarath Kumar, P. Malar, Thomas Osipowicz, S.S. Banerjee, S. KasiviswanathanVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.075
File:
PDF, 186 KB
english, 2008