Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
![](/img/cover-not-exists.png)
Structural studies of silicon oxynitride layers formed by low energy ion implantation
Alka R. Chauhan, A.D. Yadav, S.K. Dubey, T.K. Gundu RaoVolume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.12.079
File:
PDF, 595 KB
english, 2008