Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 8
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Exposure parameters in proton beam writing for hydrogen silsesquioxane
J.A. van Kan, F. Zhang, C. Zhang, A.A. Bettiol, F. WattVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2007.12.081
File:
PDF, 628 KB
english, 2008