Wedge etching by anodic oxidation and determination of...

Wedge etching by anodic oxidation and determination of shallow boron profile by ion beam analysis

J. Gyulai, G. Battistig, T. Lohner, Z. Hajnal
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Volume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2007.12.112
File:
PDF, 254 KB
english, 2008
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