The use of HI-ERDA/RBS and NRA/RBS to depth profile N in...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2008 Vol. 266; Iss. 8

The use of HI-ERDA/RBS and NRA/RBS to depth profile N in GaAs1−xNx thin films

R.W. Smith, J. Plaza, D. Ghita, M. Sánchez, B.J. García, A. Muñoz-Martín, A. Climent-Font
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Volume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2008.01.024
File:
PDF, 144 KB
english, 2008
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