Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 10
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Ion irradiation effects on surface mechanical behavior and shrinkage of hybrid sol–gel derived silicate thin films
R. Ghisleni, D.A. Lucca, Y.Q. Wang, J.-K. Lee, M. Nastasi, J. Dong, A. MehnerVolume:
266
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2008.03.020
File:
PDF, 218 KB
english, 2008