[IEEE 2009 Symposium on Piezoelectricity, Acoustic Waves,...

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[IEEE 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Wuhan (2009.12.17-2009.12.20)] 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Research on property ZnO films on diamond substrates grown by RF magnetron sputtering for saw device applications

Rui Chen,, Xu-ming Bian,, Bai-jie Fan,, Li Li,, Chun-he He,, Zi-kun Fan,
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Year:
2009
DOI:
10.1109/SPAWDA.2009.5428947
File:
PDF, 613 KB
2009
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