Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 15
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Recovery of fused silica surface damage resistance by ion beam etching
Shizhen Xu, Wanguo Zheng, Xiaodong Yuan, Haibin Lv, Xiaotao ZuVolume:
266
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2008.04.014
File:
PDF, 453 KB
english, 2008