Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2008 Vol. 266; Iss. 15
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Effects of composition and structure on hydrogen incorporation in tungsten oxide films deposited by sputtering
Aichi Inouye, Shunya Yamamoto, Shinji Nagata, Masahito Yoshikawa, Tatsuo ShikamaVolume:
266
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.nimb.2008.05.008
File:
PDF, 222 KB
english, 2008