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[IEEE 2011 International Students and Young Scientists Workshop "Photonics And Microsystems" - Cottbus, Germany (2011.07.8-2011.07.10)] 2011 International Students and Young Scientists Workshop "Photonics and Microsystems" - 45° micromirrors fabricated by silicon anisotropic etching in KOH solutions saturated with alcohols
Rola, Krzysztof P., Zubel, IrenaYear:
2011
Language:
english
DOI:
10.1109/stysw.2011.6155856
File:
PDF, 1.42 MB
english, 2011