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[IEEE International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V - Honolulu, HI, USA (5-6 June 1994)] Proceedings of International Workshop on Numerical Modeling of processes and Devices for Integrated Circuits: NUPAD V - Modeling of Ti physical vapor deposition systems
Bang, D.S., McVittie, J.P., Islamraja, M.M., Saraswat, K.C., Krivokapic, Z., Cheung, R.Year:
1994
Language:
english
DOI:
10.1109/nupad.1994.343495
File:
PDF, 269 KB
english, 1994