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[IEEE 2009 IEEE International Reliability Physics Symposium - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - Electron beam induced current investigation of stress-induced leakage and breakdown processes in high-k stacks
Chen, Jun, Sekiguchi, Takashi, Fukata, Naoki, Takase, Masami, Chikyow, Toyohiro, Hasunuma, Ryu, Yamabe, Kikuo, Sato, Motoyuki, Nara, Yasuo, Yamada, KeisakuYear:
2009
Language:
english
DOI:
10.1109/irps.2009.5173274
File:
PDF, 1.81 MB
english, 2009