[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Fabrication and electrical characterization of bottom-up silicon nanowire resonators
Sansa, Marc, Paulo, Alvaro San, Perez-Murano, FrancescYear:
2012
Language:
english
DOI:
10.1109/icsens.2012.6411456
File:
PDF, 827 KB
english, 2012