Strain-driven defect evolution in Sn+ implanted Si/SiGe...

Strain-driven defect evolution in Sn+ implanted Si/SiGe multilayer structure

P.I. Gaiduk, A. Nylandsted Larsen, W. Wesch
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Volume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.01.024
File:
PDF, 312 KB
english, 2009
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