Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 8-9
Strain-driven defect evolution in Sn+ implanted Si/SiGe multilayer structure
P.I. Gaiduk, A. Nylandsted Larsen, W. WeschVolume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.01.024
File:
PDF, 312 KB
english, 2009