Mechanisms of ion-induced GaN thin layer splitting

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 8-9

Mechanisms of ion-induced GaN thin layer splitting

O. Moutanabbir, Y.J. Chabal, M. Chicoine, S. Christiansen, R. Krause-Rehberg, F. Schiettekatte, R. Scholz, O. Seitz, S. Senz, F. Süßkraut, U. Gösele
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Volume:
267
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.nimb.2009.01.028
File:
PDF, 564 KB
english, 2009
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