Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 8-9
![](/img/cover-not-exists.png)
High concentration Mn ion implantation in Si
Nianhua Peng, Christopher Jeynes, Melanie J. Bailey, Damitha Adikaari, Vlad Stolojan, Roger P. WebbVolume:
267
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2009.01.065
File:
PDF, 243 KB
english, 2009