Fabrication of Total-Dose-Radiation-Hardened (TDRH) SOI...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 8-9

Fabrication of Total-Dose-Radiation-Hardened (TDRH) SOI wafer with embedded silicon nanoclusters

Aimin Wu, Xi Wang, Xing Wei, Jing Chen, Ming Chen, Zhengxuan Zhang
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Volume:
267
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2009.01.074
File:
PDF, 314 KB
english, 2009
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