Mn-implanted, polycrystalline indium tin oxide and indium...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 8-9

Mn-implanted, polycrystalline indium tin oxide and indium oxide films

Camelia Scarlat, Mykola Vinnichenko, Qingyu Xu, Danilo Bürger, Shengqiang Zhou, Andreas Kolitsch, Jörg Grenzer, Manfred Helm, Heidemarie Schmidt
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Volume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.01.158
File:
PDF, 449 KB
english, 2009
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