Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 8-9
Defect engineering in the MOSLED structure by ion implantation
S. Prucnal, A. Wójtowicz, K. Pyszniak, A. Drozdziel, J. Zuk, M. Turek, L. Rebohle, W. SkorupaVolume:
267
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2009.01.163
File:
PDF, 330 KB
english, 2009