A CMOS Compatible Ultrasonic Transducer Fabricated With...

Journal of Microelectromechanical Systems 2006 / 12 Vol. 15; Iss. 6

A CMOS Compatible Ultrasonic Transducer Fabricated With Deep Reactive Ion Etching

Rufer, Libor, Domingues, Christian C., Mir, Salvador, Petrini, Valrie, Jeannot, Jean-Claude, Delobelle, Patrick
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.886390
Date:
December, 2006
File:
PDF, 1.26 MB
english, 2006
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