Applications of microstructures fabricated by proton beam...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 Vol. 267; Iss. 12-13

Applications of microstructures fabricated by proton beam writing to electric-micro filters

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida
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Volume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.03.037
File:
PDF, 923 KB
english, 2009
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