Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2009 Vol. 267; Iss. 16
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Electronic and atomic structure modifications of copper nitride films by ion impact and phase separation
N. Matsunami, H. Kakiuchida, M. Tazawa, M. Sataka, H. Sugai, S. OkayasuVolume:
267
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.05.037
File:
PDF, 431 KB
english, 2009