Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2010 Vol. 268; Iss. 3-4
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Dislocation generation related to micro-cracks in Si wafers: High temperature in situ study with white beam X-ray topography
A. Danilewsky, J. Wittge, A. Hess, A. Cröll, D. Allen, P. McNally, P. Vagovič, A. Cecilia, Z. Li, T. Baumbach, E. Gorostegui-Colinas, M.R. ElizaldeVolume:
268
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2009.09.013
File:
PDF, 522 KB
english, 2010