Positive secondary-ion mass spectrometric study of silicon...

Positive secondary-ion mass spectrometric study of silicon nitride films on Si and GaAs with a cesium ion source

Lau, W. M., Vandervorst, W.
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Volume:
63
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p85-136
Date:
June, 1985
File:
PDF, 257 KB
english, 1985
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