Investigation of hydrogen concentration and hardness of ion...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2010 Vol. 268; Iss. 11-12

Investigation of hydrogen concentration and hardness of ion irradiated organically modified silicate thin films

Y. Qi, T. Prenzel, T.A. Harriman, Y.Q. Wang, D.A. Lucca, D. Williams, M. Nastasi, J. Dong, A. Mehner
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Volume:
268
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2010.02.116
File:
PDF, 381 KB
english, 2010
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