Study on preventing segregation of erbium atoms to a...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2010 Vol. 268; Iss. 10

Study on preventing segregation of erbium atoms to a silicon surface by annealing in oxygen atmosphere at high temperature

Xifeng Qin, Ming Chen, Xuelin Wang, Gang Fu, Yi Liang, Shaomei Zhang
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Volume:
268
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.nimb.2010.03.010
File:
PDF, 251 KB
english, 2010
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