[IEEE 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2014.5.19-2014.5.21)] 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) - Benefit of combining metrology techniques for thin SiGe:B layers
Le Cunff, D., Nguyen, T., Duru, R., Abbate, F., Hoglund, J., Laurent, N., Pernot, F., Wormington, M.Year:
2014
Language:
english
DOI:
10.1109/asmc.2014.6846972
File:
PDF, 411 KB
english, 2014