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[IEEE 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - Enschede, The Netherlands (8-11 October 1996)] Proceedings of the 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - A comparison of focused ion beam and electron beam induced deposition processes
Lipp, S., Frey, L., Lehrer, C., Demm, E., Pauthner, S., Ryssel, H.Year:
1996
Language:
english
DOI:
10.1109/esref.1996.888214
File:
PDF, 269 KB
english, 1996