Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2011 Vol. 269; Iss. 14
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Molecular dynamics simulations of large fluorine cluster impact on silicon with supersonic velocity
Takaaki Aoki, Toshio Seki, Jiro MatsuoVolume:
269
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.nimb.2010.12.013
File:
PDF, 1.26 MB
english, 2011