Measuring the Thickness of Oxide on Polysilicon using...

Measuring the Thickness of Oxide on Polysilicon using Ultraviolet Ellipsometry

Tompkins, Harland G.
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Volume:
139
Year:
1992
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2069492
File:
PDF, 838 KB
english, 1992
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