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[IEEE IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Tempe, Arizon, USA (Dec. 5, 2005)] IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - The roles of hydrogen and holes in trap generation and breakdown in ultra-thin SiON dielectrics
Nicollian, P.E., Krishnan, A.T., Bowen, C., Chakravarthi, S., Chancellor, C.A., Khamankar, R.B.Year:
2005
Language:
english
DOI:
10.1109/iedm.2005.1609360
File:
PDF, 493 KB
english, 2005