[IEEE IEEE InternationalElectron Devices Meeting, 2005....

[IEEE IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Tempe, Arizon, USA (Dec. 5, 2005)] IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - The roles of hydrogen and holes in trap generation and breakdown in ultra-thin SiON dielectrics

Nicollian, P.E., Krishnan, A.T., Bowen, C., Chakravarthi, S., Chancellor, C.A., Khamankar, R.B.

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Year:

2005

Language:

english

DOI:

10.1109/iedm.2005.1609360

File:

PDF, 493 KB

english, 2005

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