[IEEE 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Stockholm, Sweden (2014.04.7-2014.04.9)] 2014 15th International Conference on Ultimate Integration on Silicon (ULIS) - Scaling of metal gate workfunction variability in nanometer SOI-FinFETs
Indalecio, G., Seoane, N., Aldegunde, M., Kalna, K., Garcia-Loureiro, A. J.Year:
2014
Language:
english
DOI:
10.1109/ulis.2014.6813927
File:
PDF, 309 KB
english, 2014