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[IEEE Extended Abstracts of the Fourth International Workshop on Junction Technology - Shanghai, China (15-16 March 2004)] The Fourth International Workshop on Junction Technology, 2004. IWJT '04. - Influence of rework ashing temperature on the phase segregation and CuAl/sub 2/ precipitation in Al(Cu) metal line stacks
Ma, R., Charge Huang,, Xiang Wang,, HaiBo Yao,, Jin Wu,, Shaohua Liu,, Ruijing Han,Year:
2004
Language:
english
DOI:
10.1109/iwjt.2004.1306781
File:
PDF, 292 KB
english, 2004