[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - Suppression of abnormal oxidation of WSi/sub x//P-doped Si stack gate electrode during gate re-oxidation by additional nitrogen ion implantation
Hyeon-Soo Kim,, Sang-Do Lee,, Jeong-Youb Lee,, Sang-Moo Lee,, Kil-Ho Lee,, In-Seok Yee,, Sahng-Kyoo Lee,Volume:
1
Year:
1998
Language:
english
DOI:
10.1109/IIT.1999.812051
File:
PDF, 390 KB
english, 1998