Properties of Diamond-Like Carbon Films Fabricated by the...

Japanese Journal of Applied Physics 2002 / 9 Vol. 41; Iss. Part 1, No

Properties of Diamond-Like Carbon Films Fabricated by the Filtered Cathodic Vacuum Arc Method

Inaba, Hiroshi, Fujimaki, Shigehiko, Sasaki, Shinji, Hirano, Shinya, Todoroki, Satoru, Furusawa, Kenji, Yamasaka, Minoru, Shi, Xu
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.41.5730
Date:
September, 2002
File:
PDF, 252 KB
english, 2002
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