![](/img/cover-not-exists.png)
[IEEE 2000 Symposium on VLSI Technology. Digest of Technical Papers - Honolulu, HI, USA (13-15 June 2000)] 2000 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.00CH37104) - Breakdown measurements of ultra-thin SiO/sub 2/ at low voltage
Stathis, J.H., Vayshenker, A., Varekamp, P.R., Wu, E.Y., Montrose, C., McKenna, J., DiMaria, D.J., Han, L.-K., Cartier, E., Wachnik, R.A., Linder, B.P.Year:
2000
Language:
english
DOI:
10.1109/vlsit.2000.852783
File:
PDF, 231 KB
english, 2000