[IEEE 61st Device Research Conference - Salt Lake City, UT, USA (23-25 June 2003)] 61st Device Research Conference. Conference Digest (Cat. No.03TH8663) - Silicon nano-transistors and breaking the 10 nm physical gate length barrier
Chau, R., Doyle, B., Doczy, M., Datta, S., Hareland, S., Jin, B., Kavalieros, J., Metz, M.Year:
2003
Language:
english
DOI:
10.1109/drc.2003.1226901
File:
PDF, 381 KB
english, 2003