[IEEE 2009 IEEE International SOI Conference - Foster City, CA, USA (2009.10.5-2009.10.8)] 2009 IEEE International SOI Conference - Platinum silicide metallic source & drain process optimization for FDSOI pMOSFETs
Carron, V., Nemouchi, F., Morand, Y., Poiroux, T., Vinet, M., Bernasconi, S., Louveau, O., Lafond, D., Delaye, V., Allain, F., Minoret, S., Vandroux, L., Billon, T.Year:
2009
Language:
english
DOI:
10.1109/soi.2009.5318748
File:
PDF, 2.31 MB
english, 2009