A novel micro-machining method for the fabrication of...

Journal of Micromechanics and Microengineering 2001 / 01 Vol. 11; Iss. 1

A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels

Tay, Francis E H, Kan, J A van, Watt, F, Choong, W O
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Volume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/1/305
Date:
January, 2001
File:
PDF, 265 KB
english, 2001
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