Large-Stroke MEMS Deformable Mirrors for Adaptive Optics

Journal of Microelectromechanical Systems 2006 / 06 Vol. 15; Iss. 3

Large-Stroke MEMS Deformable Mirrors for Adaptive Optics

Dagel, D.J., Cowan, W.D., Spahn, O.B., Grossetete, G.D., Grine, A.J., Shaw, M.J., Resnick, P.J., Jokiel, B.
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Volume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.876794
Date:
June, 2006
File:
PDF, 5.21 MB
english, 2006
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