[IEEE 2012 IEEE International Reliability Physics Symposium (IRPS) - Anaheim, CA, USA (2012.04.15-2012.04.19)] 2012 IEEE International Reliability Physics Symposium (IRPS) - Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness
Sangameswaran, Sandeep, Cherman, Vladimir, De Coster, Jeroen, Witvrouw, Ann, Groeseneken, Guido, De Wolf, IngridYear:
2012
Language:
english
DOI:
10.1109/irps.2012.6241822
File:
PDF, 2.64 MB
english, 2012