Development of an X-Band Filter Using Air-Gap-Type Film...

Japanese Journal of Applied Physics 2008 / 5 Vol. 47; Iss. 5

Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators

Ueda, Masanori, Hara, Motoaki, Taniguchi, Shinji, Yokoyama, Tsuyoshi, Nishihara, Tokihiro, Hashimoto, Ken-ya, Satoh, Yoshio
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.4007
Date:
May, 2008
File:
PDF, 312 KB
english, 2008
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