![](/img/cover-not-exists.png)
Conduction Mechanism of Leakage Current in Thermal Oxide on 4H-SiC
Sometani, Mitsuru, Okamoto, Dai, Harada, Shinsuke, Ishimori, Hitoshi, Takasu, Shinji, Hatakeyama, Tetsuo, Takei, Manabu, Yonezawa, Yoshiyuki, Fukuda, Kenji, Okumura, HajimeVolume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.778-780.579
Date:
February, 2014
File:
PDF, 396 KB
english, 2014