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Stress anisotropy compensation of the sputter-deposited metal thin films by variable bias voltage
Khosraviani, Kourosh, Leung, Albert MVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/8/085005
Date:
August, 2013
File:
PDF, 1.69 MB
english, 2013