![](/img/cover-not-exists.png)
Structure control of sputtered zinc oxide films by utilizing zinc oxide seed layers tailored by ion beam assisted sputtering
Köhl, Dominik, Natarajan, Gomathi, Wuttig, MatthiasVolume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/24/245302
Date:
June, 2012
File:
PDF, 891 KB
english, 2012