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A new residual stress measurement method using ultra-wide micromachined bilayer cantilevers
Hou, Max Ti-Kuang, Chen, RongshunVolume:
14
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/14/4/008
Date:
April, 2004
File:
PDF, 323 KB
english, 2004