Plasma enhanced bonding of polydimethylsiloxane with...

Journal of Micromechanics and Microengineering 2011 / 06 Vol. 21; Iss. 6

Plasma enhanced bonding of polydimethylsiloxane with parylene and its optimization

Rezai, Pouya, Selvaganapathy, P Ravi, Wohl, Gregory R
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/065024
Date:
June, 2011
File:
PDF, 1.40 MB
english, 2011
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