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Effect of Hydrogen Gas on c -Axis Oriented AlN Films Prepared by Reactive Magnetron Sputtering
Takeda, Fumio, Mori, Teruki, Takahashi, TakakazuVolume:
20
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.20.l169
Date:
March, 1981
File:
PDF, 343 KB
english, 1981